affiliation not provided to SSRN
IBC-HJT, PECVD, crystalline silicon, patterned plasma etching
GaN, interface, Si, meltback etching, plasma
HJT-IBC, Patterned plasma etching, H2 plasma cleaning, XPS, HRTEM
Silicon heterojunction solar cells, Doped nanocrytalline silicon, Film continuity, Open circuit voltage, Cross-sectional TEM, Ellipsometry