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Binbin Hong

Zhejiang University of Technology

China

SCHOLARLY PAPERS

1

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37

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0

Scholarly Papers (1)

1.

A Novel Liquid Film Shear Polishing Technique for Silicon Carbide and its Processing Damage Mechanisms

Number of pages: 38 Posted: 17 Oct 2024
Zhejiang University of Technology, Zhejiang University of Technology, Zhejiang University of Technology, Zhejiang University of Technology, Kyoto University, affiliation not provided to SSRN, Chinese Academy of Sciences (CAS) - Institute of High Energy Physics, Chinese Academy of Sciences (CAS) - Institute of High Energy Physics, Zhejiang University, Zhejiang University - ZJU-Hangzhou Global Scientific and Technological Innovation Center and Zhejiang University of Technology
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Abstract:

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4H-SiC, Shear rheological polishing, Surface topography, subsurface damage, positron annihilation spectroscopy