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SCHOLARLY PAPERS
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Scholarly Papers (1)
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Improving the Quality of Mocvd-Grown Α-Ga2o3by Introducing an (Alxga1-X)2o3buffer on M-Plane Sapphire
Number of pages: 18
Posted: 18 Jan 2025
Zhucheng Li
,
Xiaodong Zhang
,
Li Zhang
,
Tiwei Chen
,
Gaofu Guo
,
Dengrui Zhao
,
Yu Hu
, Zhili Zou,
Guangyuan Yu
,
Wenxiang Mu
,
Zhongming Zeng
and
Baoshun Zhang
Shandong University, Chinese Academy of Sciences (CAS) - Nanofabrication facility, Chinese Academy of Sciences (CAS) - Nanofabrication facility, Chinese Academy of Sciences (CAS) - Nanofabrication facility,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
, Shandong University, Chinese Academy of Sciences (CAS) and Nanjing University of Science and Technology - School of Material Science and Engineering
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Abstract:
α-Ga2O3, (AlxGa1-x)2O3 buffer, dislocation, surface roughness
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