affiliation not provided to SSRN
Single-crystal SiC, Molecular dynamics, Material removal, Abrasive machining, Surface integrity
Chemical mechanical polishing, Silicon carbide, Involute groove, Slurry dynamics, Material removal rate
flexible polishing, tool design, non-Newtonian fluid, tool influence function
Polishing tool, Bio-inspired design, Material Removal Rate, Stereolithography, K9 glass