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Shunli Lu

affiliation not provided to SSRN

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SCHOLARLY PAPERS

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Scholarly Papers (1)

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Bio-Inspired Involute Groove Pad Textures for Enhanced Material Removal and Surface Quality in Sic Chemical Mechanical Polishing

Number of pages: 41 Posted: 19 Jul 2025
Jintao Song, Jizhuang Hui, Lei Guo, Lei Lv, Xiaohui Liu, Qichao Jin, Shunli Lu and Shuming Yang
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
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Abstract:

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Chemical mechanical polishing, Silicon carbide, Involute groove, Slurry dynamics, Material removal rate