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Manru Gong

Beijing University of Technology

100 Ping Le Yuan

Chaoyang District

Beijing, 100020

China

  • Beijing University of Technology

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Polarity reversal of dipole at the SiO2/HZO interface in FeFETs by oxygen scavenging of TiN

Number of pages: 27 Posted: 01 Jan 2026
Manru Gong, Lixing Zhou, Xiaolei Wang, Saifei Dai, Junshuai Chai, Cong Dai, Shuaijie Rong, Yunhao Chen, Chunsheng Guo, Shiwei Feng and Yaming Zhang
Beijing University of Technology, Beijing University of Technology, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Beijing University of Technology, Beijing University of Technology, Beijing University of Technology, Beijing University of Technology, Beijing University of Technology and Beijing University of Technology
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Abstract:

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ferroelectric field-effect transistor, Dipole, polarity reversal, oxygen scavenging, charge neutrality level