Lei Jin

affiliation not provided to SSRN

No Address Available

SCHOLARLY PAPERS

1

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70

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0

Scholarly Papers (1)

1.

Insights on the Quality of 4h-Sic Layers Epitaxially Grown on Homogeneous Substrates by Changing the Rotational Speed of Susceptor in the Cvd Reactor

Number of pages: 24 Posted: 26 Jul 2023
Fudan University, affiliation not provided to SSRN, Fudan University, Jihua Laboratory, Jihua Laboratory, Jihua Laboratory, Fudan University, Fudan University and Delft University of Technology
Downloads 70 (719,132)

Abstract:

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4H-SiC homoepitaxial layer, CVD reactor, Rotational speed, Quality, defects