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Gyuyoung Lee

affiliation not provided to SSRN

  • affiliation not provided to SSRN

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Effect of Fe-Complex Catalysts on Passivation Layer and Hydroxyl Radical Generation During Tungsten Chemical Mechanical Planarization

Number of pages: 48 Posted: 28 Jan 2025
Hyunho Kim, Gyuyoung Lee, Seunghwan Lee, Pengzhan Liu, Jongyeong Jeon, Ziyang Wang, Chaerin Park, Jaewon Lee, Hosin Hwang, Chulwoo Bae and Taesung Kim
Sungkyunkwan University, affiliation not provided to SSRN, affiliation not provided to SSRN, Sungkyunkwan University, affiliation not provided to SSRN, Sungkyunkwan University, affiliation not provided to SSRN, affiliation not provided to SSRN, Sungkyunkwan University, affiliation not provided to SSRN and Sungkyunkwan University
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Tungsten CMP, Fe-complex catalyst, Passivation layer, Hydroxyl radical (*OH), Fenton reaction