default author photo

Seunghwan Lee

affiliation not provided to SSRN

  • affiliation not provided to SSRN

SCHOLARLY PAPERS

1

DOWNLOADS

111

TOTAL CITATIONS

0

Scholarly Papers (1)

Actions:
Email selected abstracts
1.

Selectivity Control with Concurrent Enhancement of Inhibition in Cu/Sio2 Cmp Via Polyvinylpyrrolidone Adsorption

Number of pages: 40 Posted: 08 Feb 2025
Taesung Kim, Hosin Hwang, Seunghwan Lee, Jinhyoung Lee, Ziyang Wang, Dayoung Yu, Hyeonjeong Lee and Hyunho Kim
Sungkyunkwan University, Sungkyunkwan University, affiliation not provided to SSRN, Sungkyunkwan University - Natural Sciences Campus, Sungkyunkwan University, affiliation not provided to SSRN, Sungkyunkwan University and affiliation not provided to SSRN
Downloads 111 (635,507)

Abstract:

Loading...

Chemical mechanical planarization, Polyvinylpyrrolidone, Selectivity, Corrosion, Inhibitor