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Dayoung Yu

affiliation not provided to SSRN

  • affiliation not provided to SSRN

SCHOLARLY PAPERS

2

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140

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Scholarly Papers (2)

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1.

Selectivity Control with Concurrent Enhancement of Inhibition in Cu/Sio2 Cmp Via Polyvinylpyrrolidone Adsorption

Number of pages: 40 Posted: 08 Feb 2025
Taesung Kim, Hosin Hwang, Seunghwan Lee, Jinhyoung Lee, Ziyang Wang, Dayoung Yu, Hyeonjeong Lee and Hyunho Kim
Sungkyunkwan University, Sungkyunkwan University, affiliation not provided to SSRN, Sungkyunkwan University - Natural Sciences Campus, Sungkyunkwan University, affiliation not provided to SSRN, Sungkyunkwan University and affiliation not provided to SSRN
Downloads 111 (635,507)

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Chemical mechanical planarization, Polyvinylpyrrolidone, Selectivity, Corrosion, Inhibitor

2.

Control of Ta/Cu Selectivity in Barrier Chemical Mechanical Planarization Via Surface-Charge-Modified Silica Abrasives

Number of pages: 50 Posted: 18 Aug 2025
Jongyeong Jeon, Hyunho Kim, Dayoung Yu, Junhyeong Jeon, Kieun Kwak, Heonjae Kim, Injoon Heo, Hyeonjeong Lee, Yechan Kim, Junil Cho and Taesung Kim
affiliation not provided to SSRN, Sungkyunkwan University, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Sungkyunkwan University, affiliation not provided to SSRN, affiliation not provided to SSRN and Sungkyunkwan University
Downloads 29 (1,345,526)

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Silica surface modification, Selectivity, Electrostatic interaction, Barrier CMP