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Yinhao An

Sungkyunkwan University

53 Myeongnyun-dong 3-ga Jongno-ju

Guro-gu

Seoul, 110-745

Korea, Republic of (South Korea)

  • Sungkyunkwan University

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Scholarly Papers (1)

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Investigation of Cleaning Mechanisms for Particle, Metal Ion, and Organic Contaminations in Amorphous Carbon Post-Cmp Cleaning

Number of pages: 27 Posted: 18 Aug 2025
Ziyang Wang, Pengzhan Liu, Juyong Lee, Hyeonjeong Lee, Hyunho Kim, Hosin Hwang, Yinhao An and Taesung Kim
Sungkyunkwan University, Sungkyunkwan University, Sungkyunkwan University, Sungkyunkwan University, Sungkyunkwan University, Sungkyunkwan University, Sungkyunkwan University and Sungkyunkwan University
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Abstract:

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Amorphous carbon, Chemical Mechanical Polishing, post-CMP cleaning, CMP contamination, Cleaning mechanism