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Yang Liu

Xidian University

No. 2 South Taibai Road, Xi’an, Shaanxi

Xi'an, 710071

China

SCHOLARLY PAPERS

2

DOWNLOADS

30

TOTAL CITATIONS

0

Scholarly Papers (2)

1.

Carrier Gas Modulated Surface Dynamics and Crystalline Quality of (100) β-Ga2O3 Homoepitaxial Films via MOCVD

Number of pages: 8 Posted: 08 Jun 2026
Xidian University, Xidian University, Xidian University, Xidian University, affiliation not provided to SSRN, Xidian University, Xidian University, Xidian University, Xidian University, Hangzhou Garen Semiconductor Co., Ltd, Zhejiang University, Zhejiang University, Xidian University, Xidian University and Xidian University
Downloads 25

Abstract:

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β-Ga2O3, MOCVD, Carrier gas, Boundary layer mass transport, Surface diffusion, Step flow growth

2.

Atomic layer precursor sequence engineering for high quality (−201) β-Ga2O3 homoepitaxy

Number of pages: 26 Posted: 07 Jul 2026
Xidian University, Xidian University, Xidian University, affiliation not provided to SSRN, Xidian University, Xidian University, Xidian University, Xidian University, Hangzhou Garen Semiconductor Co., Ltd, Zhejiang University, Zhejiang University, Xidian University, Xidian University, Xidian University and Xidian University
Downloads 5

Abstract:

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β-Ga2O3, MOCVD, Precursor-sequence engineering, Homoepitaxial growth, Interfacial reaction control, Growth-mode transition