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Jinwei Liu

Xidian University

No. 2 South Taibai Road, Xi’an, Shaanxi

Xi'an, 710071

China

  • Xidian University

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Scholarly Papers (1)

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Carrier Gas Modulated Surface Dynamics and Crystalline Quality of (100) β-Ga2O3 Homoepitaxial Films via MOCVD

Number of pages: 8 Posted: 08 Jun 2026
Ying Zhou, Yunlong He, Jing Sun, Xiaoli Lu, Zhan Wang, Yang Liu, Jinwei Liu, Ke Qin, Zhuowen Huang, Jiwei Jiang, Zhu Jin, Hui Zhang, Xuefeng Zheng, Xiaohua Ma and Yue Hao
Xidian University, Xidian University, Xidian University, Xidian University, affiliation not provided to SSRN, Xidian University, Xidian University, Xidian University, Xidian University, Hangzhou Garen Semiconductor Co., Ltd, Zhejiang University, Zhejiang University, Xidian University, Xidian University and Xidian University
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Abstract:

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β-Ga2O3, MOCVD, Carrier gas, Boundary layer mass transport, Surface diffusion, Step flow growth