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Yuzhu Wu

Shandong University

27 Shanda Nanlu

South Rd.

Jinan, SD 250100

China

  • Shandong University

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Scholarly Papers (1)

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Efficient Preparation of Large-Size Aln Single Crystal Substrates：Icp-Cmp Collaborative Process Optimization

Number of pages: 19 Posted: 10 Jul 2025
Yuzhu Wu, Guodong Wang, Shouzhi Wang, Lihuan Wang, Wenhao Cao, Qiubo Li, Yajun Zhu, Qingjun Xu, Xiangang Xu and lei zhang
Shandong University, Shandong University, Shandong University, Shandong University, Shandong University, Shandong University, Shandong University, Shandong University, Shandong University and Shandong University
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Abstract:

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AlN, ICP etching, CMP, large-scale, high-precision