27 Shanda Nanlu
South Rd.
Jinan, SD 250100
China
Shandong University
AlN crystal growth, PVT method, gas transport, crucible module, finite element analysis, polycrystalline nu-cleation
PVT, AlN single-crystal, temperature distribution, thermal stresses, adhesive layer
PVT, AlN, crystal growth, high-quality, double seeds
AlN, ICP etching, CMP, large-scale, high-precision