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Defu Sun

Shandong University

27 Shanda Nanlu

South Rd.

Jinan, SD 250100

China

  • Shandong University

SCHOLARLY PAPERS

3

DOWNLOADS

79

TOTAL CITATIONS

0

Scholarly Papers (3)

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1.

ICP Enhanced Cmp for Efficient and Non-Damaging Gan Polishing

Number of pages: 20 Posted: 10 Jul 2024
Qiubo Li, Shouzhi Wang, Lei Liu, Kepeng Song, Jiaoxian Yu, Guodong Wang, Jingliang Liu, Peng Cui, Siheng Chen, Defu Sun, Zhongxin Wang, Xiangang Xu and lei zhang
Shandong University, Shandong University, Shandong University, Shandong University, Qilu University of Technology, Shandong University, affiliation not provided to SSRN, Shandong University, Shandong University, Shandong University, Shandong University, Shandong University and Shandong University
Downloads 42 (1,157,785)

Abstract:

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gallium nitride, ICP etching, subsurface damage, material removal, chemical mechanical polishing

2.

Effect of Buffer Layers on GaN Growth on Porous Substrates

Number of pages: 15 Posted: 27 Nov 2025
Zhanguo Qi, Guodong Wang, Songyang Lv, Shouzhi Wang, Zhongxin Wang, Qiubo Li, Defu Sun, Huidong Yu, Zhengtang Yang, Qingbin Liu, Huihui Shao, Xiufei Chen, Xiangang Xu and lei zhang
Shandong University, Shandong University, Shandong University, Shandong University, Shandong University, Shandong University, Shandong University, Shandong University, Shandong University, Shandong University, Shandong University, Shandong University, Shandong University and Shandong University
Downloads 32 (1,304,549)

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GaN, HVPE, buffer, Si-doped

3.

Research on Growth of GaN on Porous Metal Structure

Number of pages: 10 Posted: 23 Jun 2026
Huihui Shao, Shouzhi Wang, Zhongxin Wang, Qiubo Li, Defu Sun, Kaize Jiang, Zhanguo Qi, Mingsheng Xu and lei zhang
Shandong University, Shandong University, Shandong University, Shandong University, Shandong University, Shandong University, Shandong University, Shandong University and Shandong University
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Porous substrate, HVPE method, GaN